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Zhang, Xu, Lai, Leijie, Li, Pengzhi ORCID: 0000-0001-8883-1885 and Zhu, Li-Min
(2022)
Data-driven fractional order feedback and model-less
feedforward control of a XY reluctance-actuated micropositioning stage.
Review of Scientific Instruments, 93.
Art 115002.
doi:10.1063/5.0098759