Zhang, Defu, Li, Pengzhi ORCID: https://orcid.org/0000-0001-8883-1885, Zhang, Jianguo, Chen, Huanan, Guo, Kang and Ni, Mingyang
(2019)
Design and Assessment of a 6-DOF Micro/Nanopositioning System.
IEEE/ASME Transactions on Mechatronics, 24 (5).
pp. 2097-2107.
doi:10.1109/TMECH.2019.2931619