A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment

Li, Pengzhi ORCID: 0000-0001-8883-1885, Zhang, De-Fu, Lennox, Barry and Arvin, Farshad (2021) A 3-DOF piezoelectric driven nanopositioner: Design, control and experiment. Mechanical Systems and Signal Processing, 155. art 107603.

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Abstract

In this paper, a novel 3-degree-of-freedom (DOF) nanopositioner was investigated in order to position objects with nanometer scale accuracy. Nanopositioners are used in a variety of real-world applications, e.g. biomedical technology and nanoassembly. In this work, a nanopositioner was firstly designed with the flexure diaphragm guider, capacitive sensors and walking piezoelectric actuators. The specifically designed monolithic flexure diaphragm guider was able to significantly restrict motions in the other unwanted directions. The walking piezoelectric actuator can enable the developed nanopositioner to have nanometer scale positioning accuracy and a large travel range. Then a closed-loop sliding mode control strategy was developed to overcome the effect of the actuator’s speed nonlinearity and its stability was analysed based on Lyapunov theory. Finally, experiments focused on coupling displacement and point-to-point movement were conducted. The observed results revealed that the ratio of coupling displacement to Z displacement was less than 0.1%, which means that the coupling displacement was less than 120 nm during the Z direction travel range of the nanopositioner from -80 um to 80 um. Moreover, the positioning accuracy in the Z direction of point-to-point movement was within 10 nm and the dynamic response settled within 0.2 s. Therefore, the experimental results showed that the novel piezoelectric driven nanopositioner has excellent performance in terms of coupling displacement and nanometer scale accuracy for point-to-point movement.

Item Type: Article
Article Type: Article
Uncontrolled Keywords: Nanopositioner; Walking piezoelectric actuator; Sliding mode control; Flexure; Coupling displacement
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Schools and Research Institutes > School of Computing and Engineering > Engineering Technologies
Research Priority Areas: Applied Business & Technology
Depositing User: Pengzhi Li
Date Deposited: 08 Feb 2021 09:32
Last Modified: 01 Aug 2021 22:33
URI: https://eprints.glos.ac.uk/id/eprint/9300

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